Abstract
A compact, mechanically stable and thermally compensated tunneling microscope has been designed for use in an ultrahigh vacuum (UHV) surface characterization and analysis system. Very small concentric tubular scanning elements provide mechanical rigidity, thermal stability, and minimal cross coupling of the X, Y, and Z motions. The compact load-locking design provides full compatibility with the rest of the UHV analysis system without requiring that a disproportionately large fraction of the vacuum system be devoted to the microscope. Reported here is the design of the microscope and load-lock system, and the results of tests using the microscope in air to image the surfaces of graphite, gold, and platinum.
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Schedule a callMore From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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