A new design for a multitechnique ultrahigh vacuum surface analysis chamber with high pressure capabilities

Abstract

An ultrahigh vacuum (UHV) surface analysis chamber coupled with a high pressure cell (HPC) is described. The UHV chamber has been designed using an octagonal format to utilize several surface analytical techniques. In addition, the single-level surface analysis chamber design allows simple access to the HPC for carrying out kinetic studies at elevated pressures (≳1 atmosphere) with in situ transfer from the UHV chamber. The UHV-compatible HPC has been designed to facilitate the exchange of the sample or repair of the sample holder while maintaining the analysis chamber at UHV conditions.