Abstract
A large-stroke (8 µm) parametric resonator excited by an in-plane ‘shaped-finger’ electrostatic comb drive is fabricated using a 15 µm thick silicon-on-insulator microelectromechanical systems (SOI-MEMS) process. A quadratic capacitance-engagement response is synthesized by engineering a custom-shaped comb finger profile. A folded-flexure suspension allows lateral motion while constraining rotational modes. The excitation of the nonlinear parametric resonance is realized by selecting an appropriate combination of the linear and cubic electrostatic stiffness coefficients through a specific varying-gap comb-finger design. The large-amplitude parametric resonance promotes high signal-to-noise ratio for potential use in sensitive chemical gravimetric sensors, strain gauges, and mode-matched gyroscope applications.
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