Abstract

A method for producing submillimetre antennas and antenna arrays on quartz and Mylar substrates is described. A photolithographic technique has been employed to reproduce the arrays on Mylar substrates vacuum coated with silver. After depositing a thin layer of positive photoresist onto the silver, it is contacted with the mask and then irradiated with a uv lamp. The resist is developed and then the exposed metallisation is wet etched. The resulting antenna arrays have been found to exhibit electrical properties that are predictable from established theory

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