A Novel Parallel Precision Stage with Large Working Range Based on Structural Parameters of Flexible Hinges

Abstract

In order to solve the inherent contradiction of high precision and large working range in the traditional parallel positioning stage, a novel parallel precision stage with large working range based on optimized flexible hinge was studied. Firstly, a new structure parameter Ps was proposed, and its influence on the rotation stiffness was analyzed by comparing the commonly used flexible hinges. The factors that could enlarge the rotation ability were summarized, and the cylindrical flexible hinge with large working range was optimized. Then the cylindrical flexible hinge was used to constructed a novel parallel precision positioning stage, which could realize both of high resolution and large working range by taking use of the step and continuous motion of the piezoelectric actuators. The experiment results show that the resolution of translation is 0.09 μm, and the rotation resolution are 0.8 μrad, 0.9 μrad and 1.0 μrad, respectively. While the working range of the parallel stage could achieve 120 mm for translation, and 6.18°, 6.74° and 6.58°, respectively for each axis of rotation. All of the basic research contents is helpful for further study of the control laws of the compliant parallel mechanism.