Abstract
This paper reports a micromachined multiple folded-beam disk resonator whose thermoelastic quality factor (Q <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">TED</inf> ) can exceed 2 million owning to the topology improvement and parameters optimization for the (100) silicon resonant structure. The measured total quality factor (Q) reaches 710 k, surpassing the Q of most micromachined disk resonators. Moreover, the conducted temperature experiment indicates that the thermoelastic damping (TED) is no longer the only dominant damping mechanism.
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