Abstract
With the fast evolution of communication technology, surface acoustic wave resonators are shrinking quickly. It is inevitable that the small resonator will be undergoing a strong electric field with induced large deformation, which has to be described in wave propagation equations with the consideration of nonlinearity. In this paper, the nonlinear equations of motion are constructed by introducing the nonlinear constitutive relation and strain component, and equations of motion are simplified by Galerkin method. The wave velocity of the nonlinear SAW is obtained by combining nonlinear solutions with the boundary conditions. If the amplitude is small enough, the nonlinear results are consistent with the linear results, which verifies the feasibility of the analytical process.
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