Periodic Analysis of Surface Acoustic Wave Resonator with Dimensionally Reduced PDE Model Using COMSOL Code.

Qiaozhen Zhang,Haodong Wu,Sulei Fu,Yanguang Chen,Jinyi Ma,Panliang Tang,Zhenglin Chen,Xiangyong Zhao,Jiahe Dong

doi:10.3390/mi12020141

Abstract

Radio-frequency (RF) surface acoustic wave (SAW) resonators used as filters and duplexers are mass-produced and widely used in current mobile phones. With the numerous emergences of the diverse device structure, a universal method used for the accurate and fast simulation of the SAW resonator calls for urgent demand. However, there are too many instances where the behavior of the entire acoustic resonator cannot be characterized rapidly and efficiently due to limitations in the current computer memory and speed. This is especially true for SAW resonators configured with long arrays of inter-digital transducers (IDTs), and we have to resort to a periodic analysis. In this paper, the previously reported generalized partial differential equations (PDE) based on the two-dimensional finite element method (2D-FEM) model is extended to analysis for the periodic structure of the SAW resonator. We present model order reduction (MOR) techniques based on FEM and periodic boundary conditions to achieve a dimensionally reduced PDE model without decreasing the accuracy of computations. Examples of different SAW devices, including the regular SAW, IHP-SAW and TC-SAW resonators, are provided which shows the results of the periodic analysis compared with the experimental results of the actual resonators. The investigation results demonstrate the properties of the proposed methodology and prove its effectiveness and accuracy.

Highlights

Introduction published maps and institutional affilSurface acoustic wave (SAW) devices are used as resonators in electronic systems in a wide range of applications: mobile communications [1,2], sensors [3,4] and actuators [5,6], etc
model order reduction (MOR) techniques based on FEM and periodic boundary conditions are employed to achieve a dimensionally reduced partial differential equations (PDE) model without decreasing the accuracy of computations
This paper presents a reduced PDE-based 2D-FEM model using COMSOL code for the periodic analysis of the surface acoustic wave (SAW) resonator

Summary

Introduction

Surface acoustic wave (SAW) devices are used as resonators in electronic systems in a wide range of applications: mobile communications [1,2], sensors [3,4] and actuators [5,6], etc Because of their excellent performance, including low insertion loss, high isolation, etc., filters and duplexers based on radio-frequency (RF) SAW resonators are mass-produced and widely used in current mobile phones [7,8,9,10]. With the coming of the 5G era, more and more stringent requirements are imposed on the performance of the SAW devices This promotes the emergence of a large number of new-type SAW devices, such as temperaturecompensated SAW (TC-SAW) devices [11,12,13], incredible high-performance SAW (I.H.P. SAW) devices [14,15], and laterally-excited bulk-wave resonators (XBARs) [16,17]. In order to meet the increasing demand for high-performance SAW devices, a new-type resonator with a more complicated structure and multilayer piezoelectric substrate has been continuiations

Methods

Results

Conclusion