Abstract
Triple Material (TM) Double Gate (DG) Metal Oxide Semiconductor Field Effect Transistor (MOSFET) with high-k dielectric material as Gate Stack (GS) is presented in this paper. A lightly doped channel has been taken to enhance the device performance and reduce short channel effects (SCEs) such as drain induced barrier lowering (DIBL), sub threshold slope (SS), hot carrier effects (HCEs), channel length modulation (CLM). We investigated the parameters like Surface Potential, Electric field in the channel, SS, DIBL, Transconductance (gm ) for TM-GS-DG and compared with Single Material (SM) DG and TM-DG. The simulation and parameter extraction have been done by using the commercially available device simulation software ATLASTM.
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