Abstract
A new electron cyclotron resonance (ECR) ion source (LECR3—Lanzhou Electron Cyclotron Resonance Ion Source No. 3) has been constructed this year. The main purpose of this source is to provide highly charged ion beams for atomic physics and surface physics research. The design of this ion source is based on the IMP 14.5 GHz ECR ion source (LECR2—Lanzhou Electron Cyclotron Resonance Ion Source No. 2) with double rf heating by inserting waveguide directly and aluminum chamber. Furthermore, the volume of the plasma chamber is larger than that of LECR2 so as to increase the rf power and improve beam intensity for highly charged ions. But the hexapole field on the chamber wall is kept the same value in order to compare with the performance of LECR2. After only four days conditioning the first test results were obtained. The final result of this ion source is expected to be better than LECR2’s.
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