Abstract

AbstractBased on a boron nitride thermodynamic equilibrium phase diagram, a nanothermodynamic analysis was proposed, with respect to the effect of nanometer‐size‐induced additional pressure on the Gibbs' free energy of critical nuclei and the phase transition of hexagonal boron nitride (h‐BN) to cubic boron nitride (c‐BN), to elucidate nucleation of c‐BN during chemical vapor deposition (CVD). Notably, the analysis showed that the effect of surface tension induced by the nanometer‐size curvature of critical nuclei could drive the metastable phase region of c‐BN nucleation into the stable phase region of the boron nitride phase diagram; consequently, c‐BN nucleation would occur prior to h‐BN nucleation in the competing growth of c‐BN and h‐BN upon CVD.

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