Abstract

In this paper, a miniature all-optical dual-resonance photoacoustic (PA) sensor is demonstrated. This sensor consists of a small size resonant T-type PA cell together with an integrated sensor probe with a silicon cantilever beam. With the average time of 1 s, the minimum detection limit is tested to be 1.2 parts-per-million. Therefore, we believe that the reported sensor can be suitable for high-sensitivity measurements of trace gases in sub-cubic centimeter-scale spaces.

Full Text
Published version (Free)

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call