Abstract
Microsystems integrate electrical, mechanical and optical components on one single chip and wifl be a revolution in the next millennium. However, the design process of Microsystems is a historic challenge. An increasing need is perceived for simulation of the entire product or process at an early stage of the specification and design phase as part of the Concurrent Engineering approach. There exist also different approaches to integrate the parts into one single system, monolithic, hybrid or board integration. Therefore an integrated design tool is necessary, which takes all these facts into account and is at the same time very flexible.
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