Abstract
Initial results from a hybrid resonance ionization and secondary ionization mass spectrometer (RIMS/SIMS) instrument are presented. Advantages and disadvantages of both techniques are discussed. RIMS performed with pulsed lasers produces ions more efficiently than SIMS, but with a cost of reduced duty cycle. As a result, SIMS may be more sensitive than RIMS in certain instances. RIMS is shown to reduce background, matrix-based mass interferences by its selective atomic photoionization process. Matrix ions from Si are discriminated against using RIMS in the detection of Co. The RIMS detection limit for Co in Si is determined to be 1×1018 cm−3 (20 ppm) for depth profiling applications without pulse counting techniques commonly used in SIMS. Improvements in this figure of merit are possible.
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