Abstract
The design and construction of a high-voltage pulse generator for applications in the treatment of metal and polymer materials by plasma immersion ion implantation (PIII) are described. The generator was built in a circuit category of pulse forming network (PFN), consisting of ten LC sections with L =300 μH, C =2.5 nF and an air core high-voltage pulse transformer. The instrument was designed to produce an adjustable, several amperes, flat 70 kV pulse for over 15 μs with pulse repetition frequency from 50 to 500 Hz. The generator is fed with a high-voltage power supply (10 kV, 1.7 A) with a thyristor voltage regulator from 0 to maximal voltage value in the primary transformer winding. Voltage and current pulse shapes of a PIII reactor using this pulse source are presented.
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