Abstract
A smart gas sensor microsystem has been designed, fabricated and tested that comprises of a CMOS ASIC chip and resistive nanomaterials. The resistive microsensors are employed in a ratiometric configuration with the advantages of minimizing baseline temperature dependence, aging effects and long term drift. The novel configuration has been developed in which the response of two different types of sensing material are combined in order to enhance selectivity and thus improve upon the identification of different volatile organic compounds (VOCs). Initial tests show high efficiency in the response of this so-called duo-type sensor system. Experimental results are presented for sensor response to ethanol and toluene in air, using combinations of conductive polymers deposited onto micro-electrodes included in the ASIC chip. The high response obtained with a combination of materials for one type of VOC and the negligible response obtained for another vapour mixture, denote a selectivity level which was not reached by the individual sensors alone. Moreover, the common mode rejection of humidity response is impressive. We believe that duo-type resistive sensors offer a more robust sensing solution than individual sensors or even sensor pairs.
Published Version
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