Abstract
This paper proposes a solution for sensing spatial angular velocity. A high-performance digital interface application specific integrated circuit (ASIC) for triple-axis micro-electromechanical systems (MEMS) vibratory gyroscopes is presented. The technique of time multiplexing is employed for synergetic stable drive control and precise angular velocity measurement in three separate degrees of freedom (DOF). Self-excited digital closed loop drives the proof mass in sensing elements at its inherent resonant frequency for Coriolis force generation during angular rotation. The analog front ends in both drive and sense loops are comprised of low-noise charge-voltage (C/V) converters and multi-channel incremental zoom analog-to-digital converters (ADC), so that capacitance variation between combs induced by mechanical motion is transformed into digital voltage signals. Other circuitry elements, such as loop controlling and accurate demodulation modules, are all implemented in digital logics. Automatic amplitude stabilization is mainly realized by peak detection and proportion-integration (PI) control. Nonlinear digital gain adjustment is designed for rapid establishment of resonance oscillation and linearity improvement. Manufactured in a standard 0.35-μm complementary metal-oxide-semiconductor (CMOS) technology, this design achieves a bias instability of 2.1°/h and a nonlinearity of 0.012% over full-scale range.
Highlights
Precise and reliable inertial navigation techniques have received significant and widespread attention in fields of both civilian and military applications
Compared with typical mechanical sensing in conventional applications of inertial navigation, MEMS gyroscopes are quite superior in some remarkable advantages including low cost, good thermal
analog-to-digital converters (ADC) in both loops wereloops integrated in one single chip and analog C/Vand converters and multiplexed
Summary
Precise and reliable inertial navigation techniques have received significant and widespread attention in fields of both civilian and military applications. Despite accurate heading information provided by radio aids, independent navigation capacity of individual sensors is still indispensable in modern navigation systems especially when satellite service is not available [1]. Familiar examples of these circumstances include personal indoor navigation, deep-sea exploration, radio interference, and even electronic jamming during warfare. Navigation precision in such cases almost always relies on offline inertial navigation systems (INS). Compared with typical mechanical sensing in conventional applications of inertial navigation, MEMS gyroscopes are quite superior in some remarkable advantages including low cost, good thermal Inertial navigation generally involves the use of gyroscopes and accelerometers to measure instantaneous angular velocity and linear acceleration, respectively [2].
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