Abstract
This paper proposes an interface application-specific-integrated-circuit (ASIC) for micro-electromechanical systems (MEMS) vibratory gyroscopes. A closed self-excited drive loop is employed for automatic amplitude stabilization based on peak detection and proportion-integration (PI) controller. A nonlinear multiplier terminating the drive loop is designed for rapid resonance oscillation and linearity improvement. Capacitance variation induced by mechanical motion is detected by a differential charge amplifier in sense mode. After phase demodulation and low-pass filtering an analog signal indicating the input angular velocity is obtained. Non-idealities are further suppressed by on-chip temperature drift calibration. In order for better compatibility with digital circuitry systems, a low passband incremental zoom sigma-delta (ΣΔ) analog-to-digital converter (ADC) is implemented for digital output. Manufactured in a standard 0.35 μm complementary metal-oxide-semiconductor (CMOS) technology, the whole interface occupies an active area of 3.2 mm2. Experimental results show a bias instability of 2.2 °/h and a nonlinearity of 0.016% over the full-scale range.
Highlights
Over the last decade, micro-electromechanical system (MEMS) based inertial sensors have found widespread developments in both research efforts and commercial products owing to their preponderance of low cost, small size, low power consumption and suitability for batch fabrication, and are extensively used for detecting angular rates and accelerations in all spatial directions [1,2,3,4]
Despite diverse designs of MEMS gyroscopes based on variant principles, vibratory rate gyroscopes are the most investigated [9]
The structure of a typical micromechanical vibratory rate gyroscope has at least 2-degree-of-freedom (DOF) motion capability in orthogonal directions to achieve a Coriolis induced energy transfer between two separate resonance modes, so that two corresponding controlling loops are demanded in collocated interface application-specific-integrated-circuits (ASICs)
Summary
Micro-electromechanical system (MEMS) based inertial sensors have found widespread developments in both research efforts and commercial products owing to their preponderance of low cost, small size, low power consumption and suitability for batch fabrication, and are extensively used for detecting angular rates and accelerations in all spatial directions [1,2,3,4]. The structure of a typical micromechanical vibratory rate gyroscope has at least 2-degree-of-freedom (DOF) motion capability in orthogonal directions to achieve a Coriolis induced energy transfer between two separate resonance modes (drive and sense), so that two corresponding controlling loops are demanded in collocated interface application-specific-integrated-circuits (ASICs).
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