Abstract
The application of metallic nanowires as transmission lines at microwave frequencies has attracted interest of the nanoelectronics community in recent years. The size reduction of wires down to nano-scale inevitably introduces more challenges not only in the fabrication but in the characterization techniques. The aim of this work is to build a reliable framework to characterize a single metallic nanowire in the millimeter wave range by means of a tailored-designed coplanar waveguide platform. We conduct a comprehensive analysis on the characteristic impedances and the propagation constants of nano-scale aluminum metallic wires in relation to the change of line dimension as a function of frequency from 1 to 100GHz. A method to subtract the effect of pads and contact impedance from the measurement based on an equivalent circuit model and a cascade-based de-embedding theory is employed. We propose a quasi-TEM equivalent circuit model in the analysis to predict the measured frequency-dependent transmission line parameters. A comparison between simulated and measured result will be presented.
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