Abstract

The transmission line characteristics of an individual aluminum metallic nanowire up to 100 GHz are presented in this paper. We have built a reliable framework for characterizing such nanowires using a specially designed coplanar waveguide platform. We systematically estimate the pad parasitics, contact impedance and transmission line parameters based on an equivalent circuit model and cascade-based de-embedding theory. This is the first time that such external parasitic elements have been successfully removed from a nanoscale transmission line. The extracted frequency-dependent electrical responses show good signal levels and a high degree of reproducibility.

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