Abstract
The design of a 10-bit resistor-string digital-to-analog converter (DAC) for MOEMS micromirror interfacing is addressed in this paper. The proposed DAC, realized in a 0.18-μm BCD technology, features a folded resistor-string stage with a switch matrix and address decoders plus an output voltage buffer stage. The proposed DAC and buffer circuitry are key elements of an innovative scanning micromirror actuator, characterized by direct digital input, full differential driving, and linear response. With respect to the the state-of-the-art resistor-string converters in similar technologies, the proposed DAC has comparable nonlinearity (INL, DNL) performances while it has the advantage of a smaller area occupation, 0.17 mm2, including output buffer, and relatively low-power consumption, 200 μW at 500 kSPS and few μW in idle mode.
Highlights
Nowadays, the market of microelectromechanical systems (MEMS) and micro-opto-electromechanical systems (MOEMS) is rapidly increasing with many target applications in consumer, industrial, automotive, avionic, and biomedical fields
From other actuation schemes for MEMS/ MOEMS proposed in literature [11], which are based on switching amplifiers, the approach we propose implements a linear topology meeting the stringent linearity requirements coming from the video projection application
The sizing of the circuit has followed the design requirements coming from the application: gain-bandwidth product (GBP) higher than 300 kHz, open-loop DC gain higher than 70 dB, slew rate higher than 0.3 V/μs, supply voltage of 1.8 V ± 10%, power consumption below 200 μW, and phase margin of 60 degrees
Summary
The market of microelectromechanical systems (MEMS) and micro-opto-electromechanical systems (MOEMS) is rapidly increasing with many target applications in consumer, industrial, automotive, avionic, and biomedical fields. A key element in the MOEMS interfacing electronics is the availability of cost-effective DACs. In this work, first we present an innovative driver scheme for digital-Input actuation of a double-axis micromirror, and we present an optimized area and power-efficient 10-bit DAC which can be integrated as a hard macro in the single-chip realization of the driver. First we present an innovative driver scheme for digital-Input actuation of a double-axis micromirror, and we present an optimized area and power-efficient 10-bit DAC which can be integrated as a hard macro in the single-chip realization of the driver This system is intended to be used in a high-resolution projection display together with an RGB laser source system.
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