Abstract
This paper presents some methods to improve the resonance characteristics of film bulk acoustic-wave resonator (FBAR) devices. The FBAR devices were fabricated on Bragg reflectors. Thermal treatments were done using sintering and/or annealing processes. The measurement shows a considerable improvement of return loss (S11) and quality factor (Qs/p). These thermal treatments seem very promising for enhancing the FBAR's resonance performance. © 2005 Wiley Periodicals, Inc. Microwave Opt Technol Lett 47: 459–462, 2005; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.21199
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