Abstract
Piezoelectric Actuators (PEAs) are the key devices in micro/nano positioning systems. However, the PEAs performance is significantly degraded by the inherent non-linear behaviour. This behaviour is a consequence of the hysteresis properties contained within PEAs. Therefore, with micro/nano application a robust control system has to be adopted for such actuators. This paper proposes a systematic control method that utilizes a Fast Non-singular Terminal Sliding Mode (FNTSM) based on online perturbation estimation technique for PEA. Unlike other sliding mode, the FNTSM control method is characterised by chatter free. Besides, a zero error convergence can be guaranteed in finite time in the presence of disturbance and system uncertainties (i.e., hysteresis). The design of the FNTSM control is based on online estimation of system perturbation (FNTSMPE). A model-free robust exact differentiator (RED) is used to estimate the states of the feedback system from merely measurable position signal. Theoretical analysis and the simulation results of FNTSMPE control reveal that high-precision and robust performance is achieved in comparison with ordinary FNTSMC.
Published Version
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