A circular hydrostatic shallow recess thrust bearing integrating a micro-range tilting axis

Abstract

This article investigates the integration of a micro-range (± 10 µrad) tilting axis into a shallow recess hydrostatic thrust bearing. The working principle relies on pressure taps machined into the bearing geometry, enabling the external manipulation of the local pressure distribution, causing a change in film geometry to restore equilibrium. To estimate the possibilities and limitations, the article presents a theoretical approach to calculate the properties of the integrated tilting axis and the influence on the inherent tilting stiffness of the bearing. Furthermore, performed measurements at 10 µm film height and 10 MPa supply pressure validate the proposed theory. This technology enables the extension of a conventional hydrostatic bearing by a robust, highly sensitive, and low-cost micro-range tilting axis.