Abstract
A moving table supported by aerostatic bearings can achieve excellent accuracy of motion because of its noncontact support and, hence, it is used in various precision machine tools and measuring equipment. However, because of low viscosity of air, the damping coefficient of aerostatic bearings is not very high, causing vibration with nanometer-order amplitudes. The accuracy of machine tools and measuring equipment could deteriorate because of this vibration. It is expected that water hydrostatic bearings would have a higher damping coefficient than aerostatic bearings due to the higher viscosity of water. In addition, water, like air, does not pollute the environment. In this paper, the static and dynamic characteristics of water hydrostatic thrust bearings using porous material were numerically investigated and comparedwith conventional pocket hydrostatic bearings with a capillary restrictor. Hydrostatic porous bearings can be easily constructed because the porous material becomes a viscous restrictor itself. It was consequently found that water hydrostatic porous thrust bearings have higher maximum load capacity and slightly lower stiffness than water bearings with a capillary restrictor.
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