Abstract
A three-axes goniometer with an x−y sample stage for application in ion beam channeling has been constructed. The fully computer controlled goniometer is driven by optically encoded dc-motors that are located within the vacuum system. The angular precision of the rotational axes is better than 0.01°. The sample holder can be heated to 800 K and cooled down to 20 K by a liquid helium cryostat. The system has been designed to allow the combination of channeling RBS (Rutherford backscattering spectrometry) with PIXE (particle induced X-ray emission), NRRA (nuclear resonant reaction analysis) and ERDA (elastic recoil detection analysis). Test measurements on silicon crystals have been performed successfully. First results of measurements on KNbO3 crystals are presented.
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