Abstract
At the Institute for Reference Materials and Measurements (IRMM) a facility for hydrogen profiling has been implemented. Two techniques are being used; Nuclear Resonant Reaction Analysis (NRRA) using the 1H(15N,αγ)12C reaction and Elastic Recoil Detection Analysis (ERDA) using a He+ ion beam. The ERDA chamber is a common type of scattering chamber with a load lock system for quick changing of the samples. NRRA is performed in a UHV chamber in which the samples can be cooled to liquid nitrogen temperature and sputter cleaned with a 5 kV ion gun. The 4.43 MeV γ rays are detected using a 4 in.×4 in. BGO detector. Using only passive shielding a detection limit of hydrogen in silicon of 5×1018 atoms/cm3 has been achieved. Experimental results which exemplify the major features of the facility are presented.
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