Abstract
Aerosol deposition (AD) of crystalline fine particles onto substrate is an effective method to form the thick electronic ceramic films. This article describes the AD formation of thick electronic ceramic films and their applications in optical devices are described mostly based on their results. For obtaining thick ceramic films by aerosol deposition method (ADM), crystalline fine particles whose diameter is approximately submicron are introduced in a powder vessel so as to obtain their aerosol with an inert gas such as nitrogen. The aerosol is then led into a vacuum chamber kept at a pressure of several Pascal, and is sprayed directly onto a substrate from the slit-shaped nozzle as high-speed jet. The film deposition rate of ADM is very fast in comparison with those of other existing techniques, and the density of thus obtained film reaches 90% of bulk materials. Applications of ceramic films formed by AD are discussed as magneto-optic spatial light modulators (MOSLM) and lead-lanthanum-zirconate-titanate (PLZT) multimode optical waveguides.
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