Abstract

Microelectromechanical systems (MEMS) ultrasonic transducers, commonly referred to as capacitive micromachined ultrasonic transducers (CMUTs), have emerged as viable alternatives to traditional bulk piezoelectric transducers. In this chapter, we will discuss the design, fabrication, and integration of this transducer technology with accompanying front-end electronics. Then, we will review the wide variety of biomedical applications enabled by MEMS ultrasonic transducers including biological and chemical sensors, high-intensity focused ultrasound (HIFU) for medical therapeutics, blood flow rate measurement, and ultrasound imaging.

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