Abstract
Diamond is a demanding semiconductor that needs to be finely characterized and processed to exhibit device performances at the height of its properties. High-voltage and high-power devices requires materials free of surface defects and bulk defects in order to fabricate functional and reliable electronic components. This chapter focuses on the main diamond characterizations and processing technologies: characterization of defects and evaluation of crystal quality, preparation of atomically flat diamond surface, fabrication of electrical contacts (Schottky and ohmic) on n-type and p-type materials, device processes, and edge-termination techniques.
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