Abstract
It is quite important to understand the mechanical properties of micro materials for further development of micro-electromechanical system, for instance. Advanced testing method suitable for small-size specimens have been necessary to evaluate the mechanical properties of the small-size material such as a thin film, because these properties differ from those of bulk materials. In this study, in-situ micro material testing device combined with a scanning electron microscope developed for that purpose is reported. The idea of the testing device is in usage of multi-layered piezoelectric actuator. This actuator brings realization of a quite small-size testing device, and thus we could combine the testing device with a scanning electron microscope for observing continuously micro damage in thin film such as micro crack initiation and propagation. In this report, we will show outline of developed testing device with the multi-layered piezoelectric actuator and interested mechanical properties at a high-temperature condition, fatigue lives and fracture toughness for Type 304 stainless steel thin film.
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