Abstract
A low-profile micro ultrasonic motor has been designed and fabricated. This motor has two sector shaped vibrators. The vibrators generate elliptical motion by the 1st longitudinal mode and the 2nd bending mode. They are supported by planar elastic structure that combined with preload mechanism. Three types of pre-load systems were designed and evaluated. The diameter and thickness of one type was 9.8[mm] and 0.6[mm]. These vibrators have been oscillated around 340 [kHz]. The maximum rotation speed was 1.2 x 10^3 [rpm] and the maximum starting torque was 98.8[μNm] when the applied voltage was 20[V_<p-p>].
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