3202 扇形圧電振動子を用いた薄型マイクロ超音波モータの駆動特性の解析と評価(J22-1 次世代アクチュエータシステム(1),ジョイントセッション,21世紀地球環境革命の機械工学:人・マイクロナノ・エネルギー・環境)

Abstract

A low-profile micro ultrasonic motor has been designed and fabricated. This motor has two sector shaped vibrators. The vibrators generate elliptical motion by the 1st longitudinal mode and the 2nd bending mode. They are supported by planar elastic structure that combined with preload mechanism. Three types of pre-load systems were designed and evaluated. The diameter and thickness of one type was 9.8[mm] and 0.6[mm]. These vibrators have been oscillated around 340 [kHz]. The maximum rotation speed was 1.2 x 10^3 [rpm] and the maximum starting torque was 98.8[μNm] when the applied voltage was 20[V_<p-p>].