Abstract
A novel ultrasonic micro linear motor that uses 1st longitudinal and 2nd bending modes, derived from a bartype stator with a rectangular slot cut through the stator length, has been proposed and designed for end-effect devices of microrobotics and bio-medical applications. The slot structure plays an important role in the motor design, and can be used not only to tune the resonance frequency of the two vibration modes but also to reduce the undesirable longitudinal coupling displacement caused by bending vibration at the end of the stator. By using finite element analysis, the optimal slot dimension to improve the driving tip motion was determined, resulting in the improvement of the motor performance. The trial linear motor, with a weight of 1.6 g, gave a maximum driving velocity of 1.12 m/s and a maximum driving force of 3.4 N. A maximum mechanical output power of 1.1 W was obtained at force of 1.63 N and velocity of 0.68 m/s. The output mechanical power per unit weight was 688 W/kg.
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