Abstract
A low-profile micro ultrasonic motor has been designed and fabricated. This motor has two sector shaped vibrators. The vibrators generate elliptical motion by the 1 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">st</sup> longitudinal mode and 2 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">nd</sup> bending mode. They are supported by planar elastic structure that combined with preload mechanism. Three types of preload systems were designed and evaluated. The thickness of one type was 0.6 mm. These vibrators have been oscillated around 340 kHz. The maximum rotation speed was 2.4 x 10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sup> rpm and the maximum starting torque was 98.8 muNm when the applied voltage was 20 V <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">p-p</sub> .
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