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https://doi.org/10.1002/sdtp.11652
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Cite Publication Date: May 1, 2017 | |
 Citations: 3 |
Affiliation: Coherent (Germany)
The requirements to the quality and uniformity of excimer‐laser annealed Si films has increased significantly with the advent of high‐resolution AMOLED displays. Here, we present a newly developed optical inspection device that enables accurate metrology inside and outside the ELA process chamber.
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