20 W, 2 mJ, sub-ps, 258 nm all-solid-state deep-ultraviolet laser with up to 3 GW peak power.

Abstract

We demonstrate an all-solid-state deep-ultraviolet (DUV) laser based on the frequency-quadrupling of a 1 µm, 1.2 ps, Yb: YAG Innoslab solid-state laser at a 10 kHz repetition rate, using LBO and BBO as second-harmonic generation and fourth-harmonic generation crystals, respectively. The DUV laser delivers 20 W, 2.0 mJ, 665 fs, 258 nm DUV pulses, with an overall conversion efficiency of ∼8.7% from 1 µm to DUV. The corresponding peak power of DUV pulses is up to 3 GW, which, to the best of our knowledge, is highest in reported kHz-rate all-solid-state DUV sources driven at 1 µm wavelength.