2 - Methods for fabrication of NiTi micro- and nanoalloys

Abstract

Micro- and nanoalloys have received a great deal of attention from researchers in recent years due to their outstanding electromechanical and optical properties. The unusual properties of bulk materials are unveiled when they are fabricated at micro- and nanoscale lengths. NiTi microsystems have vast applications in electronic industries and other sectors such as in pressure transducers, microvalves, and as actuators in microelectromechanical system applications. There are various methods available to produce NiTi smart materials in the micro- and nanoscale. The fabrication technologies include sputtering, electron beam evaporation, pulsed layer deposition, chemical vapor deposition, and electrochemical deposition. Magnetron sputtering is a widely used technique in research community due to its ability to form homogeneous components at higher deposition rates, and a wide variety of components can be processed using this technique. Synthesized NiTi thin films can be developed as functional devices by following lithography and micromachining procedures. The pseudoelastic property of the NiTi system is beneficial in developing pressure gauges for use in gas sensors. The demand for micro- and nanominiature devices is increasing rapidly, but in-depth knowledge about these materials has not yet met the requirements. The research gap between the lab products and final applicable devices is limiting the use of NiTi materials in practical applications. This chapter discusses the synthesis of NiTi alloys and fabrication techniques of micro- and nanodevices.