1D Planar Silica Lens Integrated 3D Optical Interconnect System – Fabrication Techniques of Lens Integrated Facing-down 45° Micro-mirror

Abstract

Abstract This paper proposes a 3D optical interconnect system with the integration of a pair of 1D parabolically Graded Index (GRIN) lens to collimate light for free space propagation in order to reduce loss. High quality thick fluorine-doped silica film for the 1D GRIN lens is deposited by a HC-PECVD system. Its periodical refocusing character was tested by fluorescence technique. A novel fabrication technique has been developed to overcome the challenges of integrating the lens with facing-down 45° micro-mirror. The integrated 3D-optical interconnect system is tested and results show a 25 dB loss improvement over the system without lens.