Abstract
This chapter reviews the chemical vapor deposition (CVD) applications, which are not directly related to surface coatings. They are divided into various categories such as: fibers, powders, monolithic shapes, and composites. The boron fibers are one of the earliest commercial applications of CVD. Two fibers that are presently produced by CVD on a commercial scale areboron and silicon carbide. The production of these two fibers uses a monofilament starter core that is capable of being heated resistively, such as a tungsten or graphite fiber. A new process based on laser CVD does not require a core material and is able to produce fibers with a much smaller diameter. Deposition rate is up to 1 mm/sec. This type of process is developed for the production of boron, SiC, and Si3N4. The core-less deposition can be accomplished by impinging the laser beam on the growing end of a retreating fiber in a CVD atmosphere.
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More From: Handbook of Chemical Vapor Deposition, 2nd Edition
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