Abstract
We have developed a widely tunable deep-ultraviolet (DUV) laser in the wavelength range from 175 to 210 nm by the fourth harmonic generation of Ti:Sapphire laser. The fourth harmonic generation is performed by direct second-harmonic generation (SHG) of a frequency doubled Ti:Sapphire laser with KBBF crystal. The highest output power is 2.23 mW at 193 nm, and the power of the DUV laser is more than 1 mW from 182 nm to 210 nm. To our knowledge, it is the first demonstration of milliwatt-level widely tunable DUV all-solid-state laser below 200 nm by direct SHG technique.
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