Abstract
This work presents a new class of microelectromechanical system (MEMS) resonator toward 60 GHz for the fifth-generation (5G) wireless communications. The wide range of the operating frequencies is achieved by resorting to different orders of the antisymmetric Lamb wave modes in a 400-nm-thick Z-cut lithium niobate thin film. The resonance of 55 GHz demonstrated in this work marks the highest operating frequency for piezoelectric electromechanical devices. The fabricated device shows an extracted mechanical Q of 340 and an f x Q product of 1.87 × 10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">13</sup> in a footprint of 2 × 10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-3</sup> mm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> . The performance has shown the strong potential of LiNbO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sub> antisymmetric mode devices for front-end applications in 5G high-band.
Highlights
R ADIO frequency filters are indispensable components in the front ends of transceivers for selecting the input signal, improving the signal to noise ratio, avoiding spectrum growth, and duplexing transmitting paths
Consistent with our theoretical analysis of energy confinement, the finite-element analysis (FEA) results show that the higher order antisymmetric modes have spurious-free responses and less acoustic energy leakage to the LiNbO3 sections covered by metal
Z-cut LiNbO3 A-mode resonator was fabricated on a 400-nm-thick Z-cut LiNbO3 thin film
Summary
R ADIO frequency filters are indispensable components in the front ends of transceivers for selecting the input signal, improving the signal to noise ratio, avoiding spectrum growth, and duplexing transmitting (receiving) paths. They have been implemented across the entire microwave frequency range (300 MHz–30 GHz) with various technologies for addressing requirements in size, cost, weight, and performance. 5G systems, despite varying proposed standards around the globe, have turned to millimeter-wave frequency range (24.25–40 GHz for bands n257-n260, dubbed as 5G highband). The emerging 5G systems are expected to impose stringent requirements on the size and performance of RF filters, which were not conventionally designed for handheld applications at the aforementioned frequencies
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