Abstract
This work presents a new class of microelectromechanical system (MEMS) resonators enabled by Y -cut lithium niobate (LiNb03) thin films. In operation, the devices are excited into the first order antisymmetric (A1) mode vibration. The fabricated MEMS resonator has demonstrated a large effective electromechanical coupling $(\pmb{k}_{\pmb{t}}^{2})$ of 6.3% and a high quality factor (Q) of 5341, hence resulting in an extremely high figure of merit $(\mathbf{FoM}= \pmb{k}_{\pmb{t}}^{2}\cdot \pmb{Q})$ of 336 at 1.7 GHz. Additionally, this work also marks the highest experimental/Q product of $\mathbf{9.15}\times \mathbf{10}^{\mathbf{12}}\mathbf{Hz}$ for state-of-the-art MEMS resonators based on transferred lithium niobate thin films.
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