Abstract
This paper presents a new type stators for a spherical ultrasonic motor. This motor has three degree-of-freedom in one motor unit. A spherical ultrasonic motor has high performance such as it has high torque at low speeds, high holding torque, a gear is unnecessary and the motor can be driven silently. However, the output characteristics are different from general ultrasonic motors. For that reason it is necessary to investigate the vibration condition of the stator to improve output characteristics of the motor. In this paper a stator shape where the contact face is in the middle of the stator disk is examined using FEM. Experimental results shown an inprovement in the output characteristics about two times in comparison with the usual type stators.
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