도핑농도에 따른 다결정 3C-SiC 박막의 기계적 특성

Abstract

This paper describes the mechanical properties of poly(polycrystalline) 3C-SiC thin films with various doping concentration, in which poly 3C-SiC thin fil's mechanical properties according to the n-doping concentration 1(<TEX>$9.2{\times}10^{15}cm^{-3}$</TEX>), 3(<TEX>$5.2{\times}10^{17}cm^{-3}$</TEX>), and 5%(<TEX>$6.8{\times}10^{17}cm^{-3}$</TEX>) respectively were measured by nano indentation. In the case of <TEX>$9.2{\times}10^{15}cm^{-3}n$</TEX>-doping concentration, Young's modulus and hardness were obtained as 270 and 30 GPa, respectively. When the surface roughness according to n-doping concentrations was investigated by AFM(atomic force microscope), the roughness of poly 3C-SiC thin films doped by 5% concentration was 15 nm, which is also the best of them.