Молекулярно-пучковая эпитаксия нитевидных нанокристаллов InGaN на подложках SiC/Si(111) и Si(111): сравнительный анализ

Abstract

In this work, InGaN nanowires with a high In content were grown, for the first time, on hybrid SiC/Si substrates and compared with InGaN nanowires grown on Si. It was shown that InGaN nanowires on SiC/Si have lower indium content (by about 10%) compared to the nanowires on Si. The results can be beneficial for studying the growth mechanisms of InGaN nanowires and creating optoelectronic devices in the visible spectral range.