링 공진기의 체배종속적 전류분포 해석을 통한 Molding Compound의 광대역 유전율 측정 방법 연구

Abstract

In this study, we propose an algorithm that complements the frequency dependence of the relative permittivity conversion equation applied for the measurement of relative permittivity through a ring resonator. The broadband electrical characteristics of an epoxy molding compound (EMC) used in the fan-out wafer-level packaging (FOWLP) process were measured using our algorithm. By proposing a formula for calculating the permittivity that reflects the current distribution at the multiplied frequency of the microstrip ring resonator, the effective range of the permittivity of the sample was extended to the multiplied frequency region. Thus, a more sophisticated and effective complex permittivity was calculated over a wide band. The relative permittivity of the EMC measured by the proposed technique was 3.836 and the dielectric loss tangent was 0.022. This technique improved the relative permittivity measurement error rate by 3.95 % and the measurement error rate of the dielectric loss tangent by 8.4 %p compared to the conventional method.