Abstract
In this work, the influence of porosity of silicon layer with macropores on elastic and thermomechanical properties of SiC/Si substrates synthesized by the atom substitution method has been studied. Calculation of elastic constants of porous silicon has been performed by the finite element method. The results of calculation of the Young’s modulus in [111] direction are in agreement with the estimates obtained by the nanoindentation method of SiC/Si(111) substrates. The proposed theoretical model can be used for determination of elastic properties of SiC/Si substrates of different orientation.
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