Abstract
The effect of composite ion irradiation on the critical currents of superconductive niobium nitride NbN thin-film is considered. The I–V curve of 20×20 um samples with a thickness of 5.5 nm were obtained after irradiation with a composite ion beam (consisting of protons with 1% of oxygen) with an energy of 1 keV to various fluencies. The effect of irradiation and stabilizing annealing at 200°C for 1 hour on the critical currents of the superconducting transition is estimated.
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