Abstract
The effect of temperature modulation on the response of ammonia sensors based on tin dioxide films was studied. Samples were obtained by RF-magnetron sputtering of a SnO2: Sb target on sapphire substrates with pre-deposited Pt-electrodes and a heater. Varying the duration of the heating cycle and lowering the temperature in the cooling cycle can increase the response by one to two orders of magnitude. The results are explained by a change in the density of chemically adsorbed oxygen on the surface of the SnO2: Sb film depending on the temperature mode.
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