Abstract
Ranges of H and D ions in crystalline Si and W were calculated. It is shown, that as the energy of ions increases the depth distribution of ranges splits into two components: one is connected with near-surface scattering, and the other one characterizes channeled particles. A new phenomenon was observed – a stable spatial structure of the channeled part of the beam forms after the beam passes a short distance. As the ions slow down they start to transition into adjacent channels. The spatial structure of channeled ions falls apart near the stopping point of the particles. An experiment which would connect the obtained spatial distribution with angular distribution of emitted particles is proposed.
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